http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009270835-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ec030fc062b270c25327af9127bed3a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2008-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_423ee3f7dd8122a78bf25ffc780501ce |
| publicationDate | 2009-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009270835-A |
| titleOfInvention | Inspection method and apparatus for semiconductor parts |
| abstract | When inspecting a large number of semiconductor components such as LSIs and semiconductor modules, an inspection apparatus capable of performing simultaneous measurement with high accuracy even when the number of objects to be inspected or the number of measurement points increases is obtained. A plurality of probe contacts (22) capable of contacting an object to be inspected (10) are formed on a first surface of an insulating substrate (11), and a plurality of first electrode terminals (23) are formed on a second surface. The probe substrate (10) formed and electrically connected between the probe contact and the first electrode terminal by a plurality of through electrodes (24), and rewritable hardware can be mounted or built in, on one side A control board (30) having a plurality of second electrode terminals (33) connected to the hardware, and a first electrode terminal of the probe board and a second electrode terminal of the control board, which are interposed between each other. A plurality of electrically conductive buffer materials (26) that are electrically connected. [Selection] Figure 3A |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8957693-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011252773-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101959484-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013088288-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011041158-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015090363-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8911266-B2 |
| priorityDate | 2008-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 22.