http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009258504-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9a3123804de8b25637a2b1efe32b2e7d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-58 |
| filingDate | 2008-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8798b67b8af883ca1831c50c19688d0a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfdd65c90463008933480b96dfe79825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bcf3d8ef7127b3f260bc897bfc4cef4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a98d4540b781d19c59580cfdcdb5934 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a9c481d3160ec9ae58b75ba2b98a309 |
| publicationDate | 2009-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009258504-A |
| titleOfInvention | Multi-tone mask blank, multi-tone photo mask manufacturing method, and multi-tone photo mask |
| abstract | The shape accuracy of a light-shielding film and a semi-transparent film in a top half type multi-tone photomask is improved, and the film configuration is simplified. [Means for Solving the Problems] The multi-tone photomask 27 according to the present invention is formed on the transparent substrate 21, and is a semi-transparent portion A that transmits part of the exposure light, a light-shielding portion B that blocks all of the exposure light, and the entire exposure light. And a translucent part C that transmits light. The light-shielding part B has a light-shielding film pattern having a laminated structure in which at least two light-shielding film patterns 23a and 24a are laminated in the vertical direction. The material of the upper light shielding film pattern 24a is made of titanium or a metal containing titanium, and the material of the lower light shielding film pattern 23a is made of iron or a metal containing iron. A semi-transparent film pattern 22 a is provided on the surface of the light shielding film 24. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020154338-A |
| priorityDate | 2008-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.