| abstract |
The present invention provides a technique for analyzing a VOC in a clean room or the like quickly and easily with high accuracy. SOLUTION: “Suction means”, “VOC collecting means”, “air sampling pipe”, “carrier gas introduction pipe”, “column”, “detector” having a trapping agent for trapping VOC in the air A VOC rapid analysis system comprising a valve mechanism for switching a gas path to the following three modes, and analyzing a VOC component desorbed from the trapping agent of the VOC trapping means in the following analysis mode. (1) Air sampling mode; Air sampling tube → VOC collection means → Suction means (2) Analysis mode; Carrier gas introduction pipe → VOC collection means → Column → Detector (3) Cleaning mode; Carrier gas introduction pipe → VOC Collecting means and carrier gas introduction pipe->column-> detector [selection figure] Fig. 2 |