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publicationDate 2009-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2009253272-A
titleOfInvention Thin film resistor structure and manufacturing method thereof
abstract A thin film resistor structure having a high resistivity and a low resistance temperature coefficient (TCR) is provided. A thin film resistor structure including a resistive film, the resistive film having a plurality of ridge-like recesses adjacent to an upper surface thereof, and a space distributed in a mesh shape between the ridge-like recesses A thin film comprising: a copper oxide layer having a plurality of metal islands located on the copper oxide layer and installed in a space between the bumps It is a resistor structure. [Selection] Figure 2F
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