http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009253272-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc905cbef116a1ec61d12125af9427f3 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49099 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C17-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C7-006 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C7-00 |
filingDate | 2008-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e04eead01f52ef36b297cf3f395f883e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4e6a8c0362921955b26d22181fef6a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_851bf34b8dadb918076b7542f02344f0 |
publicationDate | 2009-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2009253272-A |
titleOfInvention | Thin film resistor structure and manufacturing method thereof |
abstract | A thin film resistor structure having a high resistivity and a low resistance temperature coefficient (TCR) is provided. A thin film resistor structure including a resistive film, the resistive film having a plurality of ridge-like recesses adjacent to an upper surface thereof, and a space distributed in a mesh shape between the ridge-like recesses A thin film comprising: a copper oxide layer having a plurality of metal islands located on the copper oxide layer and installed in a space between the bumps It is a resistor structure. [Selection] Figure 2F |
priorityDate | 2008-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.