| abstract |
A method of manufacturing a laminated piezoelectric element capable of exhibiting excellent displacement performance is provided. A method of manufacturing a laminated piezoelectric element 1 in which a plurality of piezoelectric ceramic layers 2 and electrode arrangement layers 3 made of crystallized ceramics are alternately laminated. In the mixing step, a raw material mixture is prepared by mixing an anisotropically shaped powder made of oriented particles and a reaction raw material powder. At this time, the anisotropic shaped powder and the reaction raw material powder are mixed at a stoichiometric ratio that produces an isotropic perovskite type compound having a predetermined composition, and Nb 2 O 5 powder and / or Ta 2 are mixed at a predetermined ratio. Mix O 5 powder. In the forming step, the raw material mixture is formed into a sheet shape so that the crystal planes of the anisotropically shaped powder are oriented in substantially the same direction. In the printing process, an electrode material is printed on the green sheet. In the lamination process, the green sheets after the printing process are laminated. In the firing step, the multilayer piezoelectric element is obtained by heating the multilayer body. [Selection] Figure 1 |