http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009244407-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-207 |
| filingDate | 2008-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2440c2bdbfadb0f028b447cdb8c0006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec32611e30f19f157ff4352cd8b4f2e0 |
| publicationDate | 2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009244407-A |
| titleOfInvention | Exposure apparatus and exposure method |
| abstract | To improve the productivity of a substrate. The difference between the minimum height Fk and the maximum height Nk of the photosensitive layer 16a is smaller than the size of the focus adjustment range R, and the maximum height portion Nk and the minimum height of the photosensitive layer 16a at the exposure position. Even when the portion F k is located within the focus adjustment range R in which the focal position of the scanner 21 can be adjusted, the average value or the median value of the heights of the plurality of portions of the photosensitive layer 16 a and the focal position of the scanner 21. Is calculated, and the height of the stage 14 is calculated based on the calculated height of the one or more stages 14. The positional relationship between the stage 14 and the scanner 21 is carried into the displacement sensor 19 by changing the position of at least one of the stage 14 and the scanner 21 on which the substrate 16 carried into the scanner 21 after the substrate 16 is placed. Correct before. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7214431-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020067501-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020085037-A1 |
| priorityDate | 2008-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161104 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453095146 |
Total number of triples: 16.