http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009236511-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec3af9072cf2cdc7a99f55c1775f8091 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2008-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90a68b11877b48ecb3134af14fe879c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bd4aacd2b8e48180e3840a1f7346fd2 |
| publicationDate | 2009-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009236511-A |
| titleOfInvention | Probe card and semiconductor test equipment |
| abstract | An object of the present invention is to efficiently perform a characteristic test of a plurality of types of semiconductor elements to realize cost reduction. A probe card substrate, a plurality of probe card substrates mounted on the probe card substrate, and a plurality of probe pins supported by the probe card substrate are provided. A probe card 10 is provided. Further, by rotating the probe card substrate 20 of the probe card 10, the probe card substrate 30 used in the probe test is selected, and the tip of the probe pin 31 supported by the selected probe card substrate 30 is connected to the probe card substrate 20. It can be made to protrude from the main surface. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013105920-A |
| priorityDate | 2008-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777387 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83648 |
Total number of triples: 17.