http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009236509-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec3af9072cf2cdc7a99f55c1775f8091 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2008-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd29f4af0ca96bd2fcf5db9ac58ce14e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bd4aacd2b8e48180e3840a1f7346fd2 |
| publicationDate | 2009-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009236509-A |
| titleOfInvention | Probe card |
| abstract | A semiconductor test is performed with high accuracy. In a probe card, a probe card substrate, a support member disposed on a main surface of the probe card substrate, a plurality of probe pins supported by the support member, and a support member are provided. A resin film 40 extended from 20, a wiring layer selectively disposed on the resin film 40, and mounted on the resin film 40, and electrically connected to at least one of the probe pins 30 through the wiring layer. And at least one electronic component 50 connected thereto. With such a probe card 1, the semiconductor test can be performed with high accuracy. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015064382-A |
| priorityDate | 2008-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83648 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777387 |
Total number of triples: 16.