http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009231476-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 2008-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ced529b3451f98441c5504b234415bb1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4a14e155cb1c4f6aa8cd86a247b11c7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44366a197abb7fcf9a741017c787c0e3 |
| publicationDate | 2009-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009231476-A |
| titleOfInvention | Manufacturing method of semiconductor chip |
| abstract | A semiconductor chip manufacturing method capable of obtaining a semiconductor chip with high production efficiency without being damaged or contaminated. A dicing process for dicing a wafer fixed to a transparent support plate through a double-sided adhesive tape to divide the wafer into semiconductor chips; a light irradiation process for irradiating each semiconductor chip with light from the transparent support plate side; A method of manufacturing a semiconductor chip having a pick-up step of picking up a semiconductor chip by a needleless pick-up method, wherein the double-sided pressure-sensitive adhesive tape contains a gas generating agent that generates gas by stimulation on one surface of a substrate And a pressure-sensitive adhesive layer containing a photocurable resin is formed on the other surface, and in the dicing process, the pressure-sensitive adhesive layer containing the gas generating agent of the double-sided pressure-sensitive adhesive tape is transparently supported. A pressure-sensitive adhesive layer containing a photocurable resin is bonded to the plate so as to be in contact with the wafer. Injection amount is large and irradiated with light so that the amount of irradiation more end decreases. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012151459-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012209545-A |
| priorityDate | 2008-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 104.