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publicationDate 2009-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2009221518-A
titleOfInvention Gas barrier film
abstract PROBLEM TO BE SOLVED: To improve transparency without deteriorating gas barrier property in a gas barrier film in which a base film is coated with a DLC film. A gas barrier film in which a silicon-containing diamond-like carbon film having a film thickness of 5 to 100 nm is formed on at least one surface of a base film, and a silicon raw material for forming the silicon-containing diamond-like carbon film And at least tetramethylsilane (TMS), and the composition ratio (C1s / (C1s + Si2p)) of the silicon-containing diamond-like carbon film by X-ray photoelectron spectroscopy is in the range of 0.01 to 0.3, and the gas barrier A gas barrier film, wherein the yellowness (YI) of the conductive film is in the range of 2.5 to 5.0. [Selection figure] None
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