http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009215365-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L45-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L49-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F38-00 |
| filingDate | 2008-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ab9fd0e67049447b5c4db1f50f5e898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ddc38583dc3b6dfc1c92cfb863307e0 |
| publicationDate | 2009-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009215365-A |
| titleOfInvention | Film-forming composition, insulating film, and electronic device |
| abstract | An object of the present invention is to provide a film-forming composition (coating liquid) capable of forming an insulating film having a low dielectric constant, excellent mechanical strength, and good surface properties. Furthermore, an insulating film obtained using the film forming composition and an electronic device having the insulating film are provided. (A) A film-forming composition comprising a polymer containing a monomer unit represented by the following formula (1) and having a weight average molecular weight of 1,500 or more. In the formula (1), X represents O, S or CH 2 , R is an alkyl group, alkenyl group, alkynyl group, aryl group, alkoxy group, acyloxy group, aryloxy group, hydroxyl group, carboxyl group, alkoxycarbonyl group, An aryloxycarbonyl group, a halogen atom, a trialkylsilyl group, or a triarylsilyl group is represented, and R may further have a substituent and may be bonded to each other to form a ring structure. n represents an integer of 0 to 4. [Selection figure] None |
| priorityDate | 2008-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 321.