http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009210290-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_217f357cdf25f5b68f965728040b8ef0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 |
filingDate | 2008-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_340e55365fc943704b46f4fd1056c541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06a9074c54216efc1443b0cbc08736b0 |
publicationDate | 2009-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2009210290-A |
titleOfInvention | Infrared radiation element |
abstract | An infrared radiation element that has a high response speed with respect to input power and can increase the output of infrared light. A heater layer 3 is provided on a beam portion 6 made of an insulating film spanned between a plurality of locations (two locations) of a peripheral portion of a recess 2 formed on one surface side of a semiconductor substrate 1. An infrared radiation element that emits infrared rays from the heater layer 3 by applying electric power to the heater layer 3, and the recess 2 is formed by anodizing a part of the one surface side of the semiconductor substrate 1. It is formed by removing the porous portion 13, and the inner surface of the recess 2 constitutes a concave mirror 2 a that reflects the infrared rays emitted from the heater layer 3 in a desired infrared ray extraction direction. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013210310-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102018101974-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014153134-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012225829-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013145540-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018008425-A |
priorityDate | 2008-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.