http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009203512-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6dd74b20fbf2e0ebf10c7bfad4f6c8c5 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3215 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-65 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-0268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-4508 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 |
| filingDate | 2008-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_769119078b05013eb5dfd266b04dae50 |
| publicationDate | 2009-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009203512-A |
| titleOfInvention | Oxide superconducting target for laser deposition |
| abstract | Provided is an oxide target for laser vapor deposition that can perform stable film formation for a long period of time in an oxide target used in a laser vapor deposition apparatus by preventing the target from being cracked by high laser output and high temperature atmosphere. Oxidation used in a laser deposition apparatus that irradiates a target with laser light to generate oxide fine particles from the target surface, deposits the fine particles on the substrate surface, and forms an oxide film on the substrate surface. In the object target, rare earth oxide powder, barium carbonate powder and copper oxide powder were mixed at a certain ratio, this mixed powder was compacted, and further, the target was obtained by partial melt molding. A silver net was embedded in the target body. An oxide superconducting target for laser deposition. [Selection] Figure 2 |
| priorityDate | 2008-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.