| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d5ebd9bdc11f7a4b267d7e865d5a84f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2982
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3011 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-0542
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-0519 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03B5-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-12 |
| filingDate |
2008-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62f523bf40bb48889378473c0dc24650
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a275695675bd2088ee17063d5a0f49d |
| publicationDate |
2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009194859-A |
| titleOfInvention |
Piezoelectric vibrator manufacturing method, piezoelectric vibrator, oscillator, electronic device, and radio timepiece |
| abstract |
An object of the present invention is to reliably maintain airtightness in a cavity and to ensure stable continuity between a piezoelectric vibrating piece and an external electrode. A base substrate, a recess for a cavity, and a lid substrate bonded to the base substrate with the recess facing the base substrate, and a cavity formed between the substrates. The piezoelectric vibrating reed 4 joined to the upper surface of the base substrate in a state of being housed inside, a pair of external electrodes 38 and 39 formed on the lower surface of the base substrate, and a plurality of metals penetrating the base substrate A pair of through-electrodes 32 and 33 formed by curing paste P including fine particles and a plurality of metal beads P1, maintaining airtightness in the cavity and electrically connected to a pair of external electrodes, and a base substrate And lead electrodes 36 and 37 that electrically connect a pair of through electrodes to the piezoelectric vibrating piece, respectively, and the melting point of the metal beads is higher than the firing temperature of the paste. To provide a piezoelectric vibrator 1. [Selection] Figure 3 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011024824-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015119165-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013157386-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9161450-B2 |
| priorityDate |
2008-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |