http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009182873-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24461d63db51630fb1930da1e2710b92 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-338 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-313 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 |
| filingDate | 2008-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_044b943b805fccd813948a58d36802de |
| publicationDate | 2009-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009182873-A |
| titleOfInvention | Method for manufacturing piezoelectric vibration device and piezoelectric vibration device |
| abstract | PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrating device and a piezoelectric vibrating device capable of preventing bonding failure due to adhesion of a metal film during frequency adjustment and bonding a piezoelectric vibrating piece to a casing satisfactorily. And In a piezoelectric vibrating piece assembly in which a large number of tuning fork type piezoelectric vibrating pieces 4 are integrally formed, a pair of joint portions 7 are provided on the front and back surfaces of a base 51 of each piezoelectric vibrating piece 4, respectively. And An electrode forming step of forming a plurality of electrodes on each piezoelectric vibrating piece, an adjustment film forming step of forming adjustment metal films 43 and 44 on the outer peripheral surface of the tip region of the pair of arm portions 41 and 42, and the adjustment metal A frequency adjustment process for adjusting the frequency by irradiating the film with a laser beam, and after dividing each piezoelectric vibrating piece from the piezoelectric vibrating piece assembly, bonding portions 7c and 7d on the back main surface side are bonded to the inside of the housing. A joining step. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017076361-A1 |
| priorityDate | 2008-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.