| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-688
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-6845 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-00 |
| filingDate |
2008-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c4755dd9c376dd27d8e5e3156ebea4f |
| publicationDate |
2009-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009180504-A |
| titleOfInvention |
Thermal fluid flow sensor |
| abstract |
PROBLEM TO BE SOLVED: To provide a thermal fluid flow sensor with improved detection sensitivity using a metal thin film as a heating resistor and a resistance temperature detector. SOLUTION: A heating resistor 3 for measuring the temperature of the heating resistor 3 and the temperature of the heating resistor 3 on a silicon substrate 2, an upstream temperature measuring resistor 5a, a downstream temperature measuring resistor 5b, and an air measurement. The temperature resistor 6 is formed, and a plurality of floating island-shaped insulating portions are arranged in the heat generating resistor 3 and its lead wiring. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8714008-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012026856-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011069677-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8723287-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103003675-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9379302-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012011387-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8429964-B2 |
| priorityDate |
2008-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |