| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 |
| filingDate |
2009-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8965f7316c3ab3760109a252d398e97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ee645d738c4e1ffe449b324e08e148a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eae19e0f0b1011c6946253d97fe87423 |
| publicationDate |
2009-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009161434-A |
| titleOfInvention |
Group III nitride semiconductor crystal manufacturing method and group III nitride semiconductor crystal |
| abstract |
The present invention provides a group III nitride semiconductor crystal manufacturing method and a group III nitride semiconductor crystal that have excellent productivity and excellent crystallinity. An intermediate layer made of at least a group III nitride compound is stacked on a substrate, and a group III nitride semiconductor crystal is formed on the intermediate layer. A pretreatment step in which plasma treatment is performed on the substrate 11 with a treatment time in the range of 30 to 3600 seconds, and then the intermediate layer 12 is formed on the substrate 11 by sputtering. A sputtering process for forming a film is provided. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017500441-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9951442-B2 |
| priorityDate |
2006-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |