http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009156550-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ad9deced45656b1526b0ccef0ca79e7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27D19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B5-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27D15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27D7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27D21-0014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K1-14 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27D19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27B9-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27D21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27B9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27D7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K1-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27B9-40 |
| filingDate | 2007-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3639edbedd873049e1d26263a83cf9f8 |
| publicationDate | 2009-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009156550-A |
| titleOfInvention | Multi-chamber heat treatment apparatus and temperature control method |
| abstract | An object of the present invention is to heat-treat an object to be treated in a heating chamber, then move to the cooling chamber and perform the cooling treatment in the cooling chamber, and measure the temperature of the object to be treated during the heat treatment and the cooling process in real time. Even if the take-up tension is strong, there is no fear that the processing object loaded in the heating chamber will move, and heat radiation from the heat insulating door of the heating chamber is suppressed during the heating chamber treatment, and the vacuum shield of the cooling chamber Provided are a multi-chamber heat treatment apparatus and a temperature control method capable of sealing a door and thereby independently controlling a gas atmosphere in a heating chamber and a cooling chamber. A temperature sensor 31 attached to a processing object X, a signal transmission device 30 for transmitting a detection signal of the temperature sensor to the outside of the heating chamber and the cooling chamber, and an outside of the heating chamber and the cooling chamber, A temperature measuring device 40 that measures the temperature of the object to be processed from the detection signal of the temperature sensor transmitted from the signal transmission device 30 is provided. [Selection] Figure 2 |
| priorityDate | 2007-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.