http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009149472-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B25-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-40 |
| filingDate | 2007-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2695b4e3b5193e70e99116bdba6e9db9 |
| publicationDate | 2009-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009149472-A |
| titleOfInvention | Method for producing needle crystal and cantilever of scanning probe microscope |
| abstract | [PROBLEMS] To produce a needle-like crystal that can produce a needle-like crystal having a very sharp tip without requiring a material such as Au that causes deterioration of the semiconductor crystal, and to cope with extremely fine irregularities on the surface of an object to be observed. And a cantilever of a scanning probe microscope that can be used. An insulating film forming step for forming an insulating film having a predetermined pattern on a gallium arsenide substrate, and a semiconductor deposition step for depositing GaInP on the gallium arsenide substrate having the insulating film formed thereon by MOCVD. In the deposition step, a GaInP layer 28 is grown in a region on the gallium arsenide substrate 20 excluding a region where the insulating film 26 is formed, and a granular material 30 made of GaInP is generated on the insulating film 26. The needle-like crystal 10 is formed by crystal growth of GaInP along the normal direction of the plate surface of the gallium arsenide substrate 20 using the granular material 30 as a seed crystal. [Selection] Figure 5 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105903427-A |
| priorityDate | 2007-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.