http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009145274-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F25B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2007-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1825a45062cb5725add4c889fef665c1 |
| publicationDate | 2009-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009145274-A |
| titleOfInvention | Electronic component inspection equipment |
| abstract | An electronic device inspection apparatus having high durability and responsiveness is provided. SOLUTION: A refrigerant supply pipe 48 for supplying a supply refrigerant Ms from a refrigerant compressor 51 to an evaporator 35 disposed so as to be able to contact with and separate from the upper surface of a heat conducting member, and a supply evaporated by the evaporator 35. A refrigerant recovery pipe 49 that recovers the recovered refrigerant Mr. made of the refrigerant Ms to the refrigerant compressor 51 is connected. The refrigerant recovery pipe 49 is provided with a hose pipe 49B so as to move with the conveyance of the IC chip T. The hose pipe 49B is heated to a temperature at which the hose pipe 49B is not cured by the recovered refrigerant heater H2. The recovered refrigerant Mr is circulated. Then, a first bypass pipe 59 is provided between the hose pipe 49B and the refrigerant compressor 51 in the refrigerant recovery pipe 49 and between the refrigerant supply pipe 48 and a part of the supplied refrigerant Ms merges with the recovered refrigerant Mr. . [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013167482-A |
| priorityDate | 2007-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.