| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_799858790a0d932d2bf525d1f2324ad6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B2203-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F2101-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-237613 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F25-431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F25-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F35-833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-237613
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-454 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2008-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb61f96b4a7462014fb5df43c797950c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7b2728d8839520bc43b6c05b2754666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dde82d7cfc8e2837bccc153bd3e3851d |
| publicationDate |
2009-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009141332-A |
| titleOfInvention |
Ozone water mixture supply apparatus and method, and substrate processing apparatus having the same |
| abstract |
An ozone water mixture supply apparatus and method, and a substrate processing apparatus including the same are provided. An ozone water mixture supply apparatus according to the present invention receives a supply of a treatment liquid and ozone water from a treatment liquid supply line and an ozone water supply line, respectively, and mixes the ozone water within a preset concentration range. A mixing line for manufacturing the mixed liquid; and a distribution line for distributing the ozone water mixed liquid manufactured from the mixing line to the processing units. The mixing line is provided with a mixing valve and a static mixer. The present invention manufactures and supplies a preset ozone water mixture by an in-line mixing method without a mixing container such as a mixing tank. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020100661-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10926301-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102555758-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I781890-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230047971-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019091925-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7236461-B2 |
| priorityDate |
2007-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |