http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009141090-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36d1d9c59848bff6ad5f55923d1290f5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2007-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a901fdeb22ab0f03d771fab8237d70c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca3e4228aeb752bd1e6d99a6f01e0b7a |
| publicationDate | 2009-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009141090-A |
| titleOfInvention | Scanning electron microscope |
| abstract | Since EBAC analysis detects a current absorbed in an analysis target wiring, it is necessary to apply a probe needle connected to an amplifier to the analysis target wiring, which is a heavy burden on the operator. For example, after searching for a needle contact target pattern and positioning it at the center of the SEM screen, the tip of the probe needle must be moved to the center of the SEM screen. It is necessary to repeat the operation of moving the probe needle onto the needle contact pattern while moving it within the screen and increasing the SEM observation magnification. According to the present invention, when the analysis target position (needle contact position) in the sample is moved to the center of the visual field of the image display unit, the tip of the probe needle of the prober is automatically moved to the image display unit. This is a scanning electron microscope apparatus that can move within the field of view. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112313782-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112313782-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010016504-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8816712-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012156026-A |
| priorityDate | 2007-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.