http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009134282-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a16e2fa556744225f7c2bba36087e7f |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L79-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-22 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-22 |
filingDate | 2008-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d56192b3365d178ad15ba51a360a518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f6519ef28c89b650af5925645d953c2 |
publicationDate | 2009-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2009134282-A |
titleOfInvention | Positive photosensitive resin composition, pattern manufacturing method, and electronic component |
abstract | Provided are a positive photosensitive resin composition, a pattern production method, and an electronic component that can be developed with an alkaline aqueous solution and that can provide a pattern having a good shape excellent in heat resistance and mechanical properties. A positive photosensitive resin composition has (a) a structural unit represented by any one of general formulas (1) and (2), and satisfies the conditions (i) and / or (ii). A polybenzoxazole to be filled or a precursor polymer thereof; (b) a compound that generates an acid upon irradiation with actinic rays; and (c) a compound that can be crosslinked or polymerized with the component (a) by heat. And the compound (c) is contained in an amount of 20 parts by weight or more with respect to 100 parts by weight of the component (a). [Selection figure] None |
priorityDate | 2007-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 243.