| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G8-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C37-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L61-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-22 |
| filingDate |
2008-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_198e601c60c434db2e9d3b90cc6d0385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5af8e7b479ecd1f51be136c6df8dbb86 |
| publicationDate |
2009-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009132854-A |
| titleOfInvention |
Photosensitive compound, photosensitive composition, resist pattern forming method and device manufacturing method |
| abstract |
A photosensitive compound capable of forming a resist pattern having a low line edge roughness (LER), a photosensitive composition containing the photosensitive compound, and a method for forming a resist pattern are provided. A structural unit represented by the following general formula (1). [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021515264-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7344001-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7250803-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020172598-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111837074-A |
| priorityDate |
2007-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |