http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009128190-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_30e3d3033a789d6a8c0ad34b140b492f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2007-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c99b75ced29afc66fdd67b35e600d6eb |
| publicationDate | 2009-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009128190-A |
| titleOfInvention | Element testing apparatus and element testing method |
| abstract | An element test apparatus that improves the productivity of a semiconductor device and realizes cost reduction is provided. A support base 11 for supporting a semiconductor element 20, a woven or non-woven conductive sheet 30s in surface contact with an emitter electrode 20e disposed on the semiconductor element 20, and a conductive material in contact with the main electrode. At least one contact pin 30g that is in contact with a pressure mechanism 30p that applies a load to the sheet 30s, an elastic layer 30e that is interposed between the conductive sheet 30s and the pressure mechanism 30p, and a control electrode of the semiconductor element 20. An element test apparatus 1 having the following is provided. Thereby, the productivity of the semiconductor device is improved and the cost is reduced. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023167013-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014089105-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016095272-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104655885-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017096903-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014032172-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014149288-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015158464-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9541577-B2 |
| priorityDate | 2007-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.