http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009120872-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12 |
| filingDate | 2007-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_992841a05675e180a09a662c9387b05e |
| publicationDate | 2009-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009120872-A |
| titleOfInvention | Method for producing metal oxide film |
| abstract | A main object of the present invention is to provide a method of manufacturing a metal oxide film that can easily adjust the crystal state of the metal oxide film. The present invention provides a metal oxide film-forming solution in which a metal salt or an organometallic compound is dissolved as a metal source, and a substrate heated to a temperature equal to or higher than the metal oxide film forming temperature, A method for producing a metal oxide film for obtaining a metal oxide film on the substrate, wherein the metal oxide film forming solution contains an acid that changes a crystal state of the metal oxide film. The above problem is solved by providing a method for manufacturing a metal oxide film. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020080275-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7031564-B2 |
| priorityDate | 2007-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 260.