http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009120866-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12 |
| filingDate | 2007-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b27ee629de244d594d2fa6b4e8201d0a |
| publicationDate | 2009-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009120866-A |
| titleOfInvention | Method for forming rare earth oxide film |
| abstract | The present invention provides a method for easily obtaining a rare-earth oxide film used as a corrosion-resistant film on the inner wall of a plasma etching treatment chamber or a film on the inner surface of a glass bulb of a fluorescent lamp as a dense and smooth film. As a ligand, an organic complex of a rare earth element having a non-decomposable melting point, such as 8-quinolinol, β-diketone, and aromatic carboxylic acid, is substantially free of water vapor or substantially. A rare earth oxide film is obtained by heating and melting in an atmosphere not containing oxygen, forming a film with the melt, and heating and melting the film to oxidatively decompose. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023175353-A1 |
| priorityDate | 2007-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.