http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009120842-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 |
| filingDate | 2008-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_380e311b0838ebd336a8f0d56fc35f5b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b371d878503af0da2b50566aef90ca7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de9c993ed66f82baae6aa97500ecf35e |
| publicationDate | 2009-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009120842-A |
| titleOfInvention | Manufacturing method of resin |
| abstract | The present invention provides a method for producing a resin suitably used for a resist composition capable of forming a resist pattern having a small LER. A monomer mixture containing at least (a′1) a (meth) acrylic acid ester having a lactone unit and (a′2) a (meth) acrylic acid ester having an acid dissociable, dissolution inhibiting group, (A) A method for producing a resin having increased alkali solubility by the action of an acid, which is used for a chemically amplified resist by dissolving in a polymerization solvent and polymerizing with a polymerization initiator. As a solvent, a monocyclic or bicyclic aromatic compound having a substituent selected from a cyclic ketone having 5 or 6 carbon atoms, a lower alkyl group having 1 to 4 carbon atoms, and a lower alkoxy group having 1 to 4 carbon atoms A solvent selected from the group consisting of a low boiling point solvent having a boiling point of 60 to 90 ° C., and the proportion of the low boiling point solvent in the polymerization solvent is 10 to 60% by mass. [Selection figure] None |
| priorityDate | 2008-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 107.