http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009119356-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2007-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee8b35fa150d9827c373911583421e4e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_822eed51edd2b11c044be3293e1e4c14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05dc3539c9670ee591e610bf2fc88699 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72dbe5d3c7774e84a7b47c0a31598ea3 |
| publicationDate | 2009-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009119356-A |
| titleOfInvention | Discharge surface treatment apparatus and discharge surface treatment method |
| abstract | Disclosed is a discharge surface treatment apparatus and method that can perform high-speed treatment and that are friendly to the environment by positively using hydroxyl radicals generated from high-humidity discharge under atmospheric pressure. SOLUTION: A high-voltage electrode 7 and ground electrodes 12A and 12B that are arranged to face the high-voltage electrode and form a plasma generation region 18 between the high-voltage electrode and the high-voltage electrode And discharge portions 10A and 10B in which at least one of the ground electrodes is covered with a dielectric, a high voltage power source 5 that applies a high voltage between the high voltage electrode and the ground electrode, and a gas in the plasma generation region A gas supply unit 3 for supplying gas, and a humidifying device 2 for adding moisture to the gas supplied from the gas supply unit to obtain a humid gas, and the high voltage electrode 7 is a high voltage electrode. The end on the processing object side is processed with a convex curved surface with a radius of curvature of 5% or more of the distance C from 7 to the ground electrodes 12A, 12B. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2509063-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114423138-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012099360-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114423138-B |
| priorityDate | 2007-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.