| abstract |
By extending the advantages of the CARE method and complementing the disadvantages of the CARE method, the flatness of the processed surface is secured without damaging the processed surface after processing the workpiece while ensuring a sufficient processing speed. This makes it possible to perform surface removal processing with an increased height. There are two or more surface removal steps and two or more cleaning steps, and the final surface removal step is carried out in a treatment liquid containing at least one of hydrohalic acid, hydrogen peroxide water, and ozone water. A workpiece is placed, and the surface of the catalyst platen having platinum, gold, ceramic solid catalyst, transition metal, glass, or a solid catalyst having acidity or basicity on the surface is processed on the workpiece. This is a catalyst-based etching that processes or removes the surface to be processed by bringing it into contact with or in close proximity to the surface. [Selection] Figure 1 |