http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009114467-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a856401f96670b24c71abe01c406ed87 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2006-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f28bad8dc106de03b696d4082ffcae0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_909325a103152147e932f25171df4fea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f164384a89e6238059d287bff454af4c |
| publicationDate | 2009-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009114467-A |
| titleOfInvention | Method for forming metal-containing structure and method for forming metal-containing laminate |
| abstract | A method for forming a novel metal-containing structure, which solves various problems caused by sputtering and plating methods that have been used in conventional device fabrication, and is the basis for fabrication of nanoscale ultra-miniaturized devices Furthermore, the present invention provides a novel method for forming a metal-containing laminate obtained by developing this method. (R-C≡C − −M + ) m , or ((R−C≡C − ) 2 −M ′ 2+ ) n, where M = Cu, Ag or Au, M ′ = Fe, Co or Ni, m and n are integers, R is an organometallic acetylide cluster having the form of a methyl (—CH 3 ) group or tertiary butyl (a hydrocarbon group such as —C (CH 3 ) 3 ) group) Preparing a compound, irradiating the organometallic acetylide cluster compound with light, photoexciting the organometallic acetylide cluster compound to generate an ethynyl anion and a metal cation, and the ethynyl anion and the metal cation Neutralization occurs through charge transfer between them, generating metal atom clusters. [Selection] Figure 1 |
| priorityDate | 2006-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.