http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009096863-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00 |
| filingDate | 2007-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bba022755b00dd3565ebe341cafffca0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebf98b03c2f19f9789074f8ad62f2830 |
| publicationDate | 2009-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009096863-A |
| titleOfInvention | Coating-type silica-based film forming composition, silica-based film forming method, and electronic component |
| abstract | A composition for forming a silica-based film that does not contain an organic group and can form a silica-based film that can achieve a relative dielectric constant of 4 or less even when cured at a relatively low temperature, and a silica-based film obtained therefrom, And the formation method and an electronic component provided with the silica-type film are provided. A composition for forming a coating-type silica-based film in which a catalyst used for hydrolyzing a compound represented by the following general formula (1) is (a) a carboxylic acid, and (b) contains an onium salt. A coating-type silica-based film forming composition having a relative dielectric constant of 4 or less when the film is cured at 450 ° C. or higher. SiX 4 (1) (Each X represents a hydrolyzable group and may be the same or different) [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8304924-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010137711-A1 |
| priorityDate | 2007-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 395.