http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009087698-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3e2ec87123b6838c1196aacbc9613d06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec7e7c1c7f85f8c9cf7ed4568884528a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate | 2007-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d2c208e8550bf8d4908e022b84b4cc8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1dd65d0dbc336d1ffa9989515048fdf3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_959a8bf6451cbaae26c5c7a4f84554a4 |
| publicationDate | 2009-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009087698-A |
| titleOfInvention | Plasma processing apparatus and surface processing method using the same |
| abstract | A plasma processing apparatus having a simple configuration. A plasma processing apparatus 100 has two openings 2i and 2o at both ends, a tube portion 2 made of a copper tube, a high-frequency power source 3, a matching circuit 3m, and two connection terminals 3f-1 and 3f-2. , A shield 4, a gas mixing unit 5, and a fixed base 6. On the surface of the object S made of a grounded conductor placed on the fixed base 6, sulfur hexafluoride (SF) along with a plasma argon flow 6 ) to inject. The shield 4 shields the matching circuit 3m, the connection terminals 3f-1 and 3f-2, and most of the pipe part 2. The gas mixing part 5 forms a flow path of sulfur hexafluoride (SF 6 ) provided in the vicinity of the opening 2 o of the pipe part 2. Sulfur hexafluoride (SF 6 ) in contact with the plasmaized argon is decomposed to generate fluoride ions (F − ) and / or fluorine atoms (F), and the surface of the workpiece S is etched. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7239134-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012234667-A |
| priorityDate | 2007-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.