abstract |
To improve the durability of a mold part having a shape in the micrometer region by using a tungsten oxide material, and to realize micropart production using the same. A cemented carbide tool for micromachining is made of a cemented carbide material having tungsten carbide as a main material for a processing tool portion, and tungsten oxide 5 having a thickness of 20 nm or more and 200 nm or less on the surface thereof. The thin film structure 2 having the thin film structure 2 and the main material of the tungsten oxide 5 is any one of a single crystal, a polycrystalline structure, and an amorphous structure 6, or a single crystal, a polycrystalline structure, and an amorphous structure 6. The thin film structure consisting of a mixed state and mainly made of tungsten oxide contains gold nanoparticles 7 having an oxidation catalytic effect, and is either a die tool for punching, a die tool for drawing, or a die tool for bending. used. [Selection] Figure 2 |