http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009081268-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd83260a96356882b5f50dd097411a72 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-585 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 2007-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c73269e0a7e2310c7df59b05340b5bb0 |
| publicationDate | 2009-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009081268-A |
| titleOfInvention | Evaluation pattern of occurrence state of hillock, substrate provided with the same, and evaluation method |
| abstract | An object of the present invention is to provide an evaluation pattern, a semiconductor substrate including the evaluation pattern, and an evaluation method that can more efficiently grasp the occurrence of hillocks. An evaluation pattern 11 according to the present invention is an evaluation pattern 11 for evaluating the occurrence of hillocks 4 and includes an annular wiring 13a having a predetermined wiring width W1 formed in an upper layer of an insulating film 12, and an annular wiring 13a. Grid pattern 13 having a number of grid wirings 13b that connect two opposing points vertically and horizontally, and an isolated wiring 14 disposed between the grids with an annular wiring 13a and a predetermined gap dimension L1. . [Selection] Figure 1 |
| priorityDate | 2007-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.