| abstract |
An increase in the molecular weight of an alkoxysilane condensate during storage and storage is suppressed, and the viscosity of a thin film-forming composition is unlikely to increase. Therefore, a thin film having a uniform film thickness and a fine pattern shape can be obtained. Provided is a method for producing a thin film forming composition that can be formed with high accuracy. A step of obtaining a solution containing an alkoxysilane condensate, water, and an alcohol derived from an alkoxy group by hydrolytic condensation of an alkoxysilane having an alkoxy group in the presence of water, and heating the solution And by azeotropically distilling water and alcohol to obtain a thin film-forming composition, and the remaining alcohol to the alkoxysilane condensate contained in the thin film-forming composition obtained. The manufacturing method of the composition for thin film formation whose molar ratio is made into the range enclosed with the broken line X of FIG. 1 according to the condensation rate R of the alkoxysilane condensate. [Selection] Figure 1 |