http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009057617-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2007-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_066eb237f6ada51a7bbaf0d39f805d78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcefe1bb4a1c71461d704d1691e43483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6518a1411979ac9d55b14c96234595c0 |
| publicationDate | 2009-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009057617-A |
| titleOfInvention | Metal-containing thin film and method for producing the same |
| abstract | PROBLEM TO BE SOLVED: To provide a flat continuous metal-containing thin film having a ruthenium-containing thin film as a lower metal film and a method for producing the same. An object of the present invention is to produce a ruthenium-containing thin film by chemical vapor deposition of an organic ruthenium complex, and then to form a metal-containing thin film on the ruthenium-containing thin film by CVD. This is solved by a method for producing a metal-containing thin film using a ruthenium-containing thin film as a lower metal film. [Selection] Figure 1 |
| priorityDate | 2007-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.