http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009054984-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2008-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5b5ffe12ffa15a74c6c704b06d56ce6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24b49aff39159db5b456f12645a7e64e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fd229dcab3d87c6d5c3561c3060eff3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fd58db6e398955e2ac6b14d95c65f91 |
| publicationDate | 2009-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009054984-A |
| titleOfInvention | Deposition apparatus parts and manufacturing method thereof |
| abstract | A deposited film adheres to the surface of a film forming apparatus component used in the film forming apparatus, and when the film is peeled off, dust is generated in the apparatus, causing contamination of a product to be formed. Further, in order to prevent such contamination, it is necessary to replace the deposited film frequently every time a deposited film slightly adheres to components used in the apparatus, resulting in a decrease in productivity. A film forming apparatus component in which a silicon sprayed film is formed on a quartz glass substrate having a roughened surface or a quartz glass substrate having no cracks having a depth of 50 μm or more on the surface of the quartz glass substrate. Even if the deposited film is thickly deposited in the film, the thermal expansion difference between the quartz glass substrate and the deposited film, or the stress inherent in the deposited film, is alleviated, and the retention of the deposited film is high. The continuous use period of the device can be particularly lengthened. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7162153-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013191768-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113651542-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019177837-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013201203-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015067524-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018048378-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594445-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015046412-A1 |
| priorityDate | 2007-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.