| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2008-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1512e632b2dd75442d3e4f65473c85eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd1403007a59f614e7df008013d026d9 |
| publicationDate |
2009-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009049417-A |
| titleOfInvention |
Semiconductor device manufacturing method and semiconductor device |
| abstract |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor device capable of reducing defects such as a decrease in uniformity of a coating film due to coating and entrainment of bubbles when a photosensitive resin composition is applied to a silicon-based substrate. . SOLUTION: 100 parts by weight of an alkali-soluble resin (A) and photosensitive materials (B) 1 to 10 The semiconductor substrate is pretreated with a solvent (D) immediately before the photosensitive resin composition containing 0 part by weight is applied onto the silicon substrate (C). Device manufacturing method. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014220301-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104797982-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2609105-C1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014178333-A1 |
| priorityDate |
2002-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |