http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009047565-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2007-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ea0951a50c518406bf4bef4bd6e4b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229fdfa766d6365a3be06b87b7224ae0 |
| publicationDate | 2009-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009047565-A |
| titleOfInvention | Sheet probe and manufacturing method thereof |
| abstract | PROBLEM TO BE SOLVED: To reliably achieve a stable electrical connection state even for an electrode to be inspected having a surface electrode having a small diameter and a high protruding height from an insulating film, and electrodes are formed at a small pitch. A sheet-like probe that can be produced and a method for producing the same are provided. A sheet-like probe according to the present invention includes a flexible insulating film formed corresponding to an electrode to be connected and having a plurality of protruding portions protruding from the surface, and a protruding portion on the surface of the insulating film. A plurality of surface electrodes formed so as to cover the surface, a plurality of back electrodes formed on the back surface of the insulating film corresponding to the surface electrodes, and the insulating film formed so as to penetrate in the thickness direction, It is characterized by comprising a short-circuit portion that electrically connects the front surface electrode and the corresponding back surface electrode. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015175844-A |
| priorityDate | 2007-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.