http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009044091-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 |
| filingDate | 2007-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b221155fe169beccfcd7036bd6af5e78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8904b89d2131c90622023f32411cdbc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9325790e092394158c4f4c0ca9e06bba |
| publicationDate | 2009-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009044091-A |
| titleOfInvention | Quartz product baking method and storage medium |
| abstract | A quartz product baking method capable of removing a metal such as aluminum contained in a quartz product used in a batch type heat treatment apparatus for heat treating a semiconductor substrate is provided. [Solution] In a heat treatment apparatus including quartz products (processing vessel 2 and substrate holding unit 3) as component parts, a large number of substrates are placed on the substrate holding unit 3 when the quartz products 2 and 3 are not yet used for heat treatment of a semiconductor substrate. The dummy substrate DW is held and carried into the processing vessel 2, and then the quartz products 2 and 3 are baked by supplying a gas containing chlorine and hydrogen, and heating the reaction vessel 2 in a heated atmosphere. The metal in the quartz products 2 and 3 is scattered and attached to the dummy substrate DW, and then the dummy substrate DW is carried out. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012069738-A |
| priorityDate | 2007-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.