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publicationDate 2009-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2009042748-A
titleOfInvention Positive resist composition and pattern forming method using the same
abstract Provided are a positive resist composition and a pattern forming method that are highly sensitive and that allow both pattern collapse and line width variation. A positive resist composition and a pattern formation method using a resin including a specific structure including an acid-decomposable group in the main chain and a repeating unit including a plurality of specific acid-decomposable groups. [Selection figure] None
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