| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36d1d9c59848bff6ad5f55923d1290f5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2875 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2889 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2007-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bedab42e498855e96ca89ae4a2e5f1f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00eca38aa371ab8099f122355777fdb2 |
| publicationDate |
2009-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009042008-A |
| titleOfInvention |
Probe card, semiconductor inspection apparatus, and semiconductor device manufacturing method |
| abstract |
An inspection apparatus is provided which has a low load, a stable contact characteristic, and a good position accuracy of a contact terminal tip for conducting an electrical signal inspection of a semiconductor element having electrodes arranged at a narrow pitch. A multi-layered wiring board is provided with a frame bonded and fixed to the back surface of a probe sheet so as to surround a group of pyramidal or truncated pyramidal contact terminals formed in a central region on the probing side of the probe sheet. A plurality of guide pins 7 having a spring property apply a pressing force to the frame 5 and the pushing piece 8 at the center, and allow a slight tilt. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7307104-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102542800-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190095395-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11402408-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200074244-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2021182083-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9927487-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180104733-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102236035-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210120854-A |
| priorityDate |
2007-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |