| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F19-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C43-04 |
| filingDate |
2007-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e43407b54f214b3225a9773deb0a5921
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c9bf9eb6b6afc9d119e5a70e5395465
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bce96448c5d65c52898e3ec09dbc01b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfdbb12ab2ec2953b49b945250721214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a384b0dd8bc9e7c236ae673d124a708 |
| publicationDate |
2009-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009040707-A |
| titleOfInvention |
Thin film forming raw material and thin film manufacturing method |
| abstract |
The present invention provides a thin film forming raw material containing a strontium precursor having properties such as volatility and thermal stability, which are particularly suitable as a raw material for CVD. A thin film forming raw material containing a strontium compound obtained by adding a bidentate coordination compound represented by the following general formula (1) to bis (pentamethylcyclopentadienyl) strontium. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021100109-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014055175-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113563390-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010219292-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113563390-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7048710-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112639163-A |
| priorityDate |
2007-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |