http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009029874-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F6-06 |
| filingDate | 2007-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7f67baedbda30c23df85a537e776cbc |
| publicationDate | 2009-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009029874-A |
| titleOfInvention | Method for producing polymer solution for resist protective film |
| abstract | 【Task】 An object of the present invention is to form a protective film that has a low content of a solvent having an affinity with a resist, does not cause an interaction with the resist at the time of coating, and can obtain a good pattern profile of the resist. It is providing the manufacturing method of the polymer for protective film formation. [Solution] The present invention (1) A step of superposing and polymerizing a solution in which a monomer, an initiator and a polymerization solvent are mixed, (2) contacting the polymerization solution with a poor solvent for the polymer to precipitate the polymer; (3) a step of solid-liquid separation of the precipitated polymer by a method such as centrifugal filtration, reduced pressure filtration, or pressure filtration; (4) a step of rinsing the obtained solid polymer, (5) A step of concentrating the obtained solid polymer after dissolving it in a film-forming solvent, In the method for producing a polymer solution for a resist protective film including the above steps, the solvent for rinsing the solid polymer is a poor solvent for the polymer, and has a boiling point lower than that of the coating film forming solvent. A method for producing a polymer solution for a resist protective film is provided. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10403491-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015034257-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102056139-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017010321-A1 |
| priorityDate | 2007-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 275.