http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009026392-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f37bc8280d9fab4985ae5b7b7fd7fc6a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-26 |
| filingDate | 2007-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6ca6ef235886acb07a5e3d2b13a6e85 |
| publicationDate | 2009-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009026392-A |
| titleOfInvention | Manufacturing method of optical disk stamper |
| abstract | Provided is a method for manufacturing a stamper for an optical disc having good transferability by electroforming without forming a conductive layer on an uneven pattern of an inorganic resist layer. In an optical disk stamper manufacturing method, an inorganic resist layer 12 is formed on a substrate 10, and the inorganic resist layer 12 is partially removed to produce an optical disk master having a concavo-convex pattern of a predetermined shape. The pattern is irradiated with vacuum ultraviolet rays in the atmosphere so that the wetting tension of the inorganic resist layer 12 in the concavo-convex pattern is in the range of 40 mN / m to 45 mN / m, and a metal layer 19 is formed on the concavo-convex pattern. 19 is peeled from the concavo-convex pattern to form a stamper. Further, the irradiation integrated light quantity of vacuum ultraviolet range 37kJ / m 2 ~45kJ / m 2 . [Selection] Figure 1 |
| priorityDate | 2007-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 14.