http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009021606-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2008-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9de0d8fd7c175d1b4c05108bea99ab73 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_708d80f4fc343e33aef0b7f14a22fe89 |
| publicationDate | 2009-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009021606-A |
| titleOfInvention | Planar antenna and plasma processing apparatus |
| abstract | A planar antenna and a plasma processing apparatus for achieving high-quality plasma processing by preventing a dielectric plate from being separated are provided. A planar antenna used in a plasma processing apparatus for supplying a microwave into a processing container to generate plasma and processing the substrate with the plasma, the planar antenna having a plurality of slits 210a, In the slit, a first slit 212a and a second slit 214a slightly spaced from the first slit are arranged in a pair. [Selection] Figure 8 |
| priorityDate | 2008-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.