Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10 |
filingDate |
2008-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_599631ad2f14dcd02f2772d66063f1fc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a561f011c515e3ca75be79b657c6911 |
publicationDate |
2009-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2009021552-A |
titleOfInvention |
Contact hole forming method, conductive post forming method, wiring pattern forming method, multilayer wiring board manufacturing method, and electronic device manufacturing method |
abstract |
A contact hole forming method excellent in size controllability is provided. A contact hole CH is formed in a wiring W1 covered with an insulating layer Z1 for connecting through the insulating layer. Forming a liquid repellent part HF by applying a liquid repellent liquid droplet FL having a liquid repellent property to a liquid containing an insulating layer forming material in a contact hole forming area DA on the wiring; And a step of covering the wiring and applying the droplet ZL containing the insulating layer forming material to form the insulating layer Z1. [Selection] Figure 9 |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11090858-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2293334-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016134597-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8723193-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012204657-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11191167-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018255647-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011044481-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012204658-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019196019-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8956969-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013065687-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017047323-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017047323-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8373170-B2 |
priorityDate |
2007-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |