| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2007-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_557eda272d6263ef54a669a9df0c36e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35461eb44b3375a5381d66b661334d04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00bd01cc4f33b0c347e6c92559642e35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a533bb89ef253532dbf99c8209714b9 |
| publicationDate |
2009-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009021442-A |
| titleOfInvention |
Method for forming porous film and computer-readable recording medium |
| abstract |
A porous low dielectric constant film is stably formed with good reproducibility by a plasma CVD process using an organic silicon compound raw material. A surface densified layer is formed by subjecting a surface of a SiOCH film formed by a plasma CVD method using an organic silicon compound raw material to an oxygen plasma treatment, and further, a SiOCH under the surface densified layer is formed by a hydrogen plasma treatment. From the film, CHx groups and OH groups are released through the surface densified layer at a controlled rate to stably form a porous low dielectric constant film. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011082274-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011091161-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8828886-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011043337-A1 |
| priorityDate |
2007-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |