http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009014380-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_171750900388cc1eb516511793bdb9e2 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-3563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
filingDate | 2007-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5c2bfe5442de7cfe7e169701dc92cf6 |
publicationDate | 2009-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2009014380-A |
titleOfInvention | Method for measuring infrared absorption spectrum of film |
abstract | PROBLEM TO BE SOLVED: To obtain a practical infrared absorption spectrum of a film to be measured even if the substrate for forming the film to be measured is a substrate having a large absorption of infrared light such as a borosilicate glass substrate. Like that. Infrared light is irradiated to a film to be measured 12 formed on a substrate 11 of a first sample 1 and an ITO film 13 that semi-transmits infrared light, and the infrared light reflected thereby is detected. The first infrared absorption spectrum is obtained from the detection result. In addition, the ITO film 13 formed on the substrate 11 of the second sample 2 is irradiated with infrared light, and the reflected infrared light is detected, and a second infrared absorption spectrum is obtained from the detection result. obtain. Then, when the second infrared absorption spectrum is subtracted from the first infrared absorption spectrum, a net infrared absorption spectrum of the measured film 12 of the first sample 1 is obtained. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5002078-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113820290-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8548545-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012046423-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102781325-A |
priorityDate | 2007-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.